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High purity Alumina Ceramics（Al2O3:>99.7%）
- Alumina Wafer Polishing Plate / Turn Table
Large Size High Purity Alumina Baseboard for LCD Manufacturing Equipment
Material: High Purity Alumina
Application:
Semiconductor, petroleum, chemical, photovoltaic, LCD etc industries，as mechanical parts, electronic parts, microwave induction disk, insulation parts. Such as manufacturing semiconductor devices, vacuum equipment, liquid crystal manufacturing equipment and other components. For example the large size of high-purity alumina ceramic Wafer Polishing Plate / Turn Table is an important component of CMP in chemical mechanical polishing, the Alumina Baseboard for LCD.
Features:
- High-purity Al2O3 99.7% -99.9%
- High Mechanical Strength
- High Wear Resistance
- High Electrical Insulation
- High chemical durability
- Good Heat and Corrosion Resistance
Manufacturer Advantage :
We have independent intellectual property of PIBM Spontaneous Solidification system ,Professionally produce high-quality fine ceramic components.The new technology break through the deformation and cracking problems of large-sized ceramic wet blanks in the preparation process, and the product performance is significantly optimized for the large-sized ceramic parts prepared by traditional methods.
Product Shape and Size:
1. Alumina Wafer Polishing Plate / Turn Table. Disc, ring size below ∅850mm, thickness 45mm.
2. Alumina Baseboard for LCD as Support receptors/Carrier Plate. Shape as Long board, long bar, square board, thin board size below 1500*600mm , such as : 1200x500x20, 1400x900x30 etc.
3. Guide rails below 1000 * 45 * 45mm.
4. Empty tubes, cylinders, electric vacuum tubes, etc. With size below 300 ~ 600 × L500mm.
5. Customized products with various shape parts are accepted.
Main Parameter : (Chemical / physical)
Property | Unit | Chemshun Product |
Density | g/cm3 | 3.94-3.97 |
Al2O3 | % | 99.7-99.9 |
Vickers hardness | GPa | ≧17 |
Three-point bending strength | MPa | 440-550 |
Cm2/S | 0.0968 | |
Modulus of Elasticity | Gpa | 356 |
Molding Process: Ceramic Finishing Process:
Quality Assurance:
Each Batch products is inspected in the factory lab and the National Inspection Center.
High purity Alumina Ceramics（Al2O3:>99.7%）
- Alumina Wafer Polishing Plate / Turn Table
Large Size High Purity Alumina Baseboard for LCD Manufacturing Equipment
Material: High Purity Alumina
Application:
Semiconductor, petroleum, chemical, photovoltaic, LCD etc industries，as mechanical parts, electronic parts, microwave induction disk, insulation parts. Such as manufacturing semiconductor devices, vacuum equipment, liquid crystal manufacturing equipment and other components. For example the large size of high-purity alumina ceramic Wafer Polishing Plate / Turn Table is an important component of CMP in chemical mechanical polishing, the Alumina Baseboard for LCD.
Features:
- High-purity Al2O3 99.7% -99.9%
- High Mechanical Strength
- High Wear Resistance
- High Electrical Insulation
- High chemical durability
- Good Heat and Corrosion Resistance
Manufacturer Advantage :
We have independent intellectual property of PIBM Spontaneous Solidification system ,Professionally produce high-quality fine ceramic components.The new technology break through the deformation and cracking problems of large-sized ceramic wet blanks in the preparation process, and the product performance is significantly optimized for the large-sized ceramic parts prepared by traditional methods.
Product Shape and Size:
1. Alumina Wafer Polishing Plate / Turn Table. Disc, ring size below ∅850mm, thickness 45mm.
2. Alumina Baseboard for LCD as Support receptors/Carrier Plate. Shape as Long board, long bar, square board, thin board size below 1500*600mm , such as : 1200x500x20, 1400x900x30 etc.
3. Guide rails below 1000 * 45 * 45mm.
4. Empty tubes, cylinders, electric vacuum tubes, etc. With size below 300 ~ 600 × L500mm.
5. Customized products with various shape parts are accepted.
Main Parameter : (Chemical / physical)
Property | Unit | Chemshun Product |
Density | g/cm3 | 3.94-3.97 |
Al2O3 | % | 99.7-99.9 |
Vickers hardness | GPa | ≧17 |
Three-point bending strength | MPa | 440-550 |
Cm2/S | 0.0968 | |
Modulus of Elasticity | Gpa | 356 |
Molding Process: Ceramic Finishing Process:
Quality Assurance:
Each Batch products is inspected in the factory lab and the National Inspection Center.
